Brooks-instrument GF81 Manuel d'utilisateur télécharger pdf (Page 25)

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Brooks

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Section 2 Installation

2-11 Purge the Gas Supply Line Before GF40/GF80/GF81 Series Installation

Before operating the GF40/GF80/GF81 Series, the gas supply line must be

completely purged with nitrogen or argon to ensure the line is free from toxic

or flammable gases, contaminants, moisture, and oxygen. The purge gas

must be free of moisture and oxygen to less than 100 ppb. Purge the gas

lines as follows or in accordance with prescribed company and safety

procedures.

1. Shut off the process gas supply valve(s) upstream of the GF40/GF80/

GF81 Series. If such a valve is not available, shut the valve on the gas

panel. Tag the valve at this point to prevent accidental re-exposure of the

process gas to the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the

process gas. Cycle purging consists of evacuating to a low pressure

adequate to induce out-gassing and then purging to remove adhered

moisture and oxygen. If a toxic or reactive gas is present and a clogged

GF40/GF80/GF81 Series is suspected, then proceed with caution.

Pump down and purge the GF40/GF80/GF81 Series from both down-

stream and upstream lines. If check valves are present in the gas line,

both pumping down and purging are required. Pumping down without

purging is inadequate. If a good vacuum source is not available, the

GF40/GF80/GF81 Series can be de-contaminated by purge only.

3. Repeat the purge cycle several times within 2-4 hours to complete the

cleaning. For toxic and corrosive gasses, it is recommended to use 100-

120 cycles.

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Brooks-instrument GF81 Manuel d'utilisateur Page 25