Brooks-instrument Mfi Series Manuel d'utilisateur télécharger pdf (Page 11)

1-3

Section 1 Introduction

Brooks

Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Repeatability

0.25% of rate

Sensitivity to Mounting Attitude

±0.5% full scale maximum deviation from specified accuracy after

re-zeroing under 200 psig. Specify mounting attitude at time of order to

insure optimum performance.

Temperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C

Span: Less than ±1.0% F.S. shift from original calibration over 50°F to

122°F range (10°C to 50°C)

Pressure Sensitivity

±0.03% per psi up to 200 psig (N

)

Ratings:

Operating Pressure

Refer to Table 1-1

Differential Pressure (Controllers)

Mf50: 5 to 50 psid pressure drop

Mf51: 10 to 50 psid pressure drop

Mf53: Standard high differential valve > 30 to 290 psid

Optional: Low differential valve 7.5 to 30 psid (<500 slpm)

11.8 to 30 psid (>500 slpm)

Response Time

Less than 6 seconds to within 2% of full scale of final value for a 0 to 100%

command change. Refer to Figure 1-2, typical performance curve.

Temperature Ambient/Gas

41°F to 149°F (5°C to 65°C)

Leak Integrity, Outboard

1 x 10

-9

atm cc/sec. He (excluding permeation)

PHYSICAL:

Materials of Construction

Standard wetted parts: Stainless steel with Viton

fluoroelastomers or Buna-N

Optional: Kalrez

Dimensions

Controllers: Refer to Figures 1-6 through 1-9

Meters: Refer to Figures 1-10 through 1-12

Process Connections

Refer to the table at the bottom of each dimensional drawing for process

connection sizes and options specific to each size controller and meter.

1 2 ... 6 7 8 9 10 11 12 13 14 15 16 ... 81 82

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Brooks-instrument Mfi Series Manuel d'utilisateur Page 11

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