Brooks-instrument Mfi Series Manuel d'utilisateur télécharger pdf (Page 42)

4-4

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

When used with a reactive (sometimes toxic) gas, contamination

or corrosion may occur as a result of plumbing leaks or improper

purging. Plumbing should be checked carefully for leaks and the

controller purged with dry Nitrogen before use.

CAUTION

B. Bench Troubleshooting

1. Properly connect the mass flow instrument to a correct Vdc power

supply, refer to Table 1-3, power requirements and setpoint source

(controller). Connect an output signal readout device (4-1/2 digit

voltmeter recommended) to TB-1, Terminals 5 and 4 (refer to Figure

1-4 and Table 1-4). Apply power, set the setpoint to zero (controller).

Allow the instrument to warm-up for 45 minutes. Do not connect to a

gas source at this time.

Observe the output signal and, if necessary, perform the zero

adjustment procedure (Section 3-3). If the output signal will not zero

properly, refer to the sensor troubleshooting section and check the

sensor. If the sensor is electrically functional, the printed circuit board is

defective and will require replacement.

Table 4-2 Sensor Troubleshooting

1 2 ... 37 38 39 40 41 42 43 44 45 46 47 ... 81 82

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Brooks-instrument Mfi Series Manuel d'utilisateur Page 42