Brooks-instrument GF81 Manuel d'utilisateur télécharger pdf (Page 12)

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Brooks

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Section 1 Introduction

778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and

Adapter Cables *Software, MultiFlo Configurator

A331710003 Cable Assembly 2.5 mm

A332300001 Converter 232/485

A332295001 Power Supply MFC

A332297002 Cable, Power, 9-Pin

A332297001 Cable, Power, DeviceNet

* MultiFlo Configurator Software is available on the Brooks Instrument

website at:

www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

Advanced Thermal Measurement Sensor

Brooks high-performance thermal flow sensor brings together key design

elements to deliver the accurate, repeatable measurement under

challenging process conditions:

• Improved accuracy at elevated temperatures through isothermal

packaging and ambient temperature sensing and compensation

• Enhanced signal-to-noise performance enables improved low setpoint

accuracy

• A large bore, corrosion resistant, Hastelloy

C-22 sensor tube ensures

long life and reliability

• Optimized temperature profile for gases prone to thermal decomposi-

tion

• Onboard electronics store sensor calibration data for ease of service

Extensive Mechanical Configurations

GF40 GF80

1/4'' VCR

9/16'' - 18 UNF 1-1/8'' C Seal 92 mm

1/8'' tube compression

1/4'' tube compression

3/8'' tube compression

1/2'' tube compression

6-mm tube compression

10-mm tube compression

1/4'' RC

1/4'' VCO

1/4'' NPT

1 2 ... 7 8 9 10 11 12 13 14 15 16 17 ... 77 78

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Brooks-instrument GF81 Manuel d'utilisateur Page 12

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