Brooks-instrument GF81 Manuel d'utilisateur télécharger pdf (Page 28)

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Brooks

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Section 2 Installation

2-13 Perform a Leak Test

It is critical to leak test the gas supply lines and GF40/GF80/GF81 Series

connections before turning on the process gas supply after any new

installation. Check for leaks using a helium leak detector or any other

appropriate leak test method. Follow leak test specifications as defined by

integrator.

2-14 Performance Checks

This section describes how to zero and sequence the GF40/GF80/GF81

Series devices for proper operation.

• The GF40/GF80/GF81 Series must be warmed up for at least 45 minutes.

• The active gas page must be correct.

2-15 Zeroing Setup Process

The following steps are required before the GF40/GF80/GF81 Series is zeroed.

1. Place the GF40/GF80/GF81 under normal inlet operating pressure.

2. Make sure that the GF40/GF80/GF81 Series has been installed inside

the equipment (panel) for at least four hours and powered up at least

one hour prior to zeroing. This insures that the GF40/GF80/GF81 Series

is in its "use attitude" and is operating at normal temperature. If the

GF40/GF80/GF81 Series is subjected to a vacuum purge for more than

one minute, turn off the GF40/GF80/GF81 Series (i.e., provide a zero

setpoint) for a time period of twice the vacuum purge time.

3. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the

downstream shut-off valve (7). This eliminates a pressure drop across

the GF40/GF80/GF81 Series and subsequent leakage from the PID

control valve inside the GF40/GF80/GF81 Series.

4. Provide a 100% setpoint to the GF40/GF80/GF81 Series for no longer

than 30 seconds. This equalizes the pressure across the PID control valve.

5. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent any

pressure effects from the regulator (3).

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Brooks-instrument GF81 Manuel d'utilisateur Page 28