Brooks-instrument GF81 Manuel d'utilisateur télécharger pdf (Page 44)

4-6

Brooks

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Section 4 Maintenance & Troubleshooting

Symptoms & Possible Causes Corrective Action

5. No gas flow below some setpoint.

NOTE: When the setpoint is

decreased below this point, the

GF40/GF80/GF81 Series signal remains at

some value higher than the

setpoint.

Is the gas inlet/outlet differential Verify that the pressure is correct for

pressure too high? regulator to achieve proper pressure.

Is the GF40/GF80/GF81 Series leaking? Check for contamination. Test the GF40/GF80/GF81 Series

for leak integrity. Replace the GF40/GF80/GF81 Series

if leakage is detected.

6. Gas flow oscillates.

Is the GF40/GF80/GF81 Series calibrated for the Check the GF40/GF80/GF81 Series side can label. Run

gas flowing? a flow check to verify. If flow is incorrect,

replace the GF40/GF80/GF81 Series.

Is there too much gas pressure Verify that the pressure is correct for

across the GF40/GF80/GF81 Series? this gas and range. If required, adjust

regulator to achieve proper pressure

reading.

Are inlet and outlet pressures stable? If outlet pressure is unstable, check for

(no oscillation or hunting) a faulty vacuum pump,

or hunting at a downstream valve.

Check inlet pressure on tool. A faulty

pressure regulator can make the

GF40/GF80/GF81 Series appear to oscillate.

Adjust inlet pressure up or down by 2

psig increments until hunting disappears.

Verify common gas pressure is

within range.

NOTE: Hunting or oscillation can be

contributed to multiple GF40/GF80/GF81 Series sharing

a common gas manifold. Therefore,

inspect gas delivery sources to

the gas box (for example; two tools

sharing a common gas bottle and

calling for gas at the same time). Valve leak.

Unregulated gas pressure from Facilities.

Table 4-2 GF40/GF80/GF81 Series Troubleshooting Guide (Continued)

1 2 ... 39 40 41 42 43 44 45 46 47 48 49 ... 77 78

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Brooks-instrument GF81 Manuel d'utilisateur Page 44

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