Brooks-instrument GF81 Manuel d'utilisateur télécharger pdf (Page 52)

A-2

Brooks

®

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Appendix A: GF40/GF80 Series Gas Table

Table A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43

Min inlet pressure for

vac. exhaust (PSIA)

Min inlet pressure for

atm. exhaust (PSIA) SA40 SA41 SA42 SA43

Gas Symbol

Gas

Code Gas Name Elastomer seal GF040

SA40-

SA47 SA48 SA50

SA40-

SA47 SA48 SA50 Low High Low High Low High Low High

SiCl4 108 Silicon Tetrachloride Kalrez 8.7 16.0 0 0 3 6 7 18 19 56

C3H9N 109 Trimethylamine Kalrez 6.7 8.7 15.5 16.0 0 0 3 8 9 25 26 78

SF6 110 Sulfur Hexafluoride Viton,EPDM 19.7 19.7 20.7 21.3 21.3 22.0 0 0 3 8 9 25 26 77

C2F6 118 Hexafluoroethane (Freon-116) Viton,Buna 19.7 19.7 21.3 21.3 0 0 3 8 9 23 24 71

WF6 121 Tungsten Hexafluoride - 9.7 11.7 16.3 17.0 0 0 3 5 6 16 17 50

C3F8 128 Perfluoropropane Viton 19.7 19.7 21.3 21.3 0 0 3 5 6 16 17 50

C4F8 129 Octafluorocyclobutane Viton 19.7 19.7 21.3 21.3 0 0 3 5 6 16 17 50

C3F6 138 Hexafluoropropylene Viton,Buna 19.7 19.7 21.3 21.3 0 0 3 6 7 20 21 60

C2HF5 155 PENTAFLUOROETHANE (FREON-125) Viton 19.7 19.7 21.3 21.3 0 0 3 8 9 25 26 77

CH2F2 160 Difluoromethane Viton 24.7 29.7 25.1 29.7 3 6 7 19 20 57 58 174

CH6Si 185 Methylsilane (MONO) - 9.7 14.7 16.3 18.4 3 4 5 12 13 37 38 111

(CH3)3SiH 190 Trimethylsilane (TMSi) - 6.7 15.5 0 0 3 7 8 20 21 62

C5F8 266 Octafluorocyclopentene - 9.7 14.7 16.3 18.4 0 0 3 5 6 14 15 44

C4F6 270 Hexafluoro-2-butyne - 9.7 16.3 0 0 3 6 7 19 20 57

C4F6-q) 297 Hexafluoro Butadiene-1-3 - 14.7 14.7 18.4 18.4 0 0 3 6 7 17 18 52

C5F8O 354 Epoxyperfluorocyclopentene - 19.7 19.7 21.3 21.3 0 0 3 4 5 13 14 40

Si3H9N 368 Trisilylamine (TSA) - 6.0 7.2 15.3 15.6 0 0 3 6 7 20 21 60

10%GeH4/H2 509 10%Germane/Hydrogen MIX-Check components 20.7 20.7 22.0 22.0 3 9 10 28 29 86 87 260

10%PH3/H2 516 10%Phosphine/Hydrogen MIX-Check components 14.7 14.7 18.4 18.4 3 9 10 28 29 90 91 275

4.5%PH3/N2 528 4.5%Phosphine/Nitrogen MIX-Check components 20.7 29.7 22.0 29.7 3 10 11 30 31 94 95 280

20%O2/He 536 20%Oxygen/Helium MIX-Check components 19.7 29.7 21.3 29.7 4 13 14 38 39 120 121 360

5%H2/N2 542 5%Hydrogen/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280

1%B2H6/H2 557 1%Diborane Hydrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 91 92 270

1%PH3/H2 563 1%Phosphine/Hydrogen MIX-Check components 19.7 19.7 21.3 21.3 3 10 11 30 31 90 91 273

3%B2H6/N2 595 3%Diborane/Nitrogen MIX-Check components 20.7 29.7 22.0 29.7 3 9 10 29 30 90 91 270

3%H2/N2 597 3%Hydrogen/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280

30%He/O2 603 30%Helium/Oxygen MIX-Check components 24.7 29.7 25.1 29.7 4 11 12 33 34 100 101 301

30%O2/He 604 30%Oxygen/Helium MIX-Check components 19.7 29.7 21.3 29.7 4 12 13 37 38 113 114 345

4%H2/He 606 4%Hydrogen/Helium MIX-Check components 19.7 19.7 21.3 21.3 5 14 15 41 42 126 127 400

4%H2/N2 607 4%Hydrogen/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280

5%B2H6/Ar 615 5%Diborane/Argon MIX-Check components 24.7 25.1 4 12 13 38 39 116 117 353

50%PH3/SiH4 632 50%Phosphine/Silane MIX-Check components 16.7 24.7 19.4 25.1 3 6 7 20 21 62 63 190

10%O2/He 649 10%Oxygen/Helium MIX-Check components 19.7 24.7 21.3 25.1 5 13 14 41 42 123 124 380

2%SiH4/N2 653 2%SILANE/NITROGEN MIX-Check components 19.7 24.7 21.3 25.1 3 10 11 30 31 93 94 280

5%B2H6/N2 654 5%Diborane/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 9 10 28 29 86 87 262

.8%B2H6/N2 662 .8%Diborane/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 93 94 280

10%PH3/He 674 10%Phosphine/Helium MIX-Check components 14.7 19.7 18.4 21.3 4 13 14 40 41 120 121 370

2%B2H6/N2 695 2%Diborane/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 93 94 280

10%GeH4/Ar 698 10%Germane/Argon MIX-Check components 24.7 29.7 25.1 29.7 4 12 13 38 39 114 115 350

5%H2/He 762 5%Hydrogen/Helium MIX-Check components 19.7 19.7 21.3 21.3 5 14 15 41 42 125 126 400

5%B2H6/He 766 5%Diborane/Helium MIX-Check components 14.7 16.7 18.4 19.4 4 12 13 38 39 115 116 350

15%B2H6/H2 820 15%Diborane/Hydrogen MIX-Check components 14.7 14.7 18.4 18.4 3 8 9 25 26 76 77 230

3%C2H4/He 878 3%Ethylene/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 13 14 40 41 125 126 375

10%B2H6/Ar 881 5%Diborane/Argon MIX-Check components 24.7 29.7 25.1 29.7 4 11 12 35 36 105 106 320

2.7%C2H4/He 897 2.7%Ethylene/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 13 14 40 41 125 126 377

1%GeH4/H2 898 1%Germane/Hydrogen MIX-Check components 20.7 20.7 22.0 22.0 3 10 11 30 31 91 92 275

.5%GeH4/H2 910 0.5%Germane/Hydrogen MIX-Check components 20.7 20.7 22.0 22.0 3 10 11 30 31 92 93 280

2%PH3/H2 916 2%Phosphine/Hydrogen MIX-Check components 21.7 21.7 22.7 22.7 3 10 11 30 31 91 92 275

3.9%H2/N2 930 3.9%Hydrogen/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280

10%B2H6/He 939 10%Diborane/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 11 12 34 35 103 104 314

30%C2H4/He 946 30%Ethylene/Helium MIX-Check components 19.7 24.7 21.3 25.1 3 10 11 30 31 90 91 275

10%H2/He 950 10%Hydrogen/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 13 14 40 41 125 126 380

15%H2/B2H6 953 15%Hydrogen/Diborane MIX-Check components 19.7 19.7 21.3 21.3 3 4 5 14 15 42 43 130

17%CH4/CO2 958 17%Methane/Carbon Dioxide MIX-Check components 24.7 29.7 25.1 29.7 3 7 8 23 24 70 71 210

20%CH6Si/H2 962 20%Methylsilane (MONO)/Hydrogen MIX-Check components 14.7 19.7 18.4 21.3 3 7 8 23 24 71 72 212

50%CH3SiHCl2/H2 965 50%Dichloromethylsilane/Hydrogen MIX-Check components 11.7 13.7 17.0 17.9 3 4 5 14 15 42 43 130

20%GeH4/H2 978 20%Germane/Hydrogen MIX-Check components 19.7 24.7 21.3 25.1 3 8 9 26 27 81 82 241

0.5%B2H6/He 979 0.5%Diborane/Helium MIX-Check components 14.7 19.7 18.4 21.3 5 14 15 42 43 130 131 400

COS-Special 5022 Carbonyl Sulfide (Special) - 24.7 29.7 25.1 29.7 3 7 8 20 21 60 61 183

For reference only, consult factory on the latest tables.

Brooks-instrument GF81 Manuel d'utilisateur Page 52

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Brooks-instrument GF81 Manuel d'utilisateur Page 52

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